The center of microtechnologies (ZfM) is a research center at the Technische Universität Chemnitz, active in the fields of advanced technologies for microelectronics, microsystems and silicon micromachining as well as nanotechnologies. We have more than 30 years of experience in the field of wafer processing for system integration using top-down technologies in combination with around 1000 m² of clean room environment.

In addition to the honorable task of project coordination of DeDNAed, the ZfM will be responsible for the integration of the DNA origami hybrids on different surfaces to enable characterization and application of the biosensor platform. We are developing a suitable thin-film system on silicon wafers with optimized surface properties using CVD, electron beam lithography and plasma etching in order to create binding points that are adapted to the small sizes of DNA origami in the range of 100 nm and less. The process of self-organized selective surface immobilization of the DNA origami hybrid structures is also implemented by the ZfM, based on the knowledge that has been gained in the field of the bottom-up technologies and especially their surface integration in recent years through various projects and collaborations (cfaed, MERGE, Bio4Comp, …) for CNTs, QDs and DNA origami. This includes, next to silicon-based substrates, also flexible ones such as polymers or paper on which DNA origami hybrid structures will be deposited using the Langmuir-Blodgett process.